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| # | Company | Amount | Rank | Status |
|---|---|---|---|---|
| 1 | L1₹2.4 CrAdmitted-Finance NO 2 13 1ST PHASE PEENYA INDUSTRIAL AREA PEENYA BANGALORE KARNATAKA 560058 | BENGALURU URBAN | KARNATAKA | 560058 | ₹2.4 Cr | L1 | Admitted-Finance |
| 2 | L2₹2.8 Cr+₹41.8 L (17.3%)Admitted-Finance 49 3 49 4 OPP BHARAT BENZ SHOWROOM THONCHINAKUPPE VILLAGE NELAMANGALA TALUK BANGALORE RURAL KARNATAKA 562123 | BENGALURU RURAL | KARNATAKA | 562123 | ₹2.8 Cr+₹41.8 L (17.3%) | L2 | Admitted-Finance |
| Sl No | Description | Qty | Unit | VACUUM TECHNIQUES PVT LTD L1 | RANVAC Technologies L2 |
|---|---|---|---|---|---|
| 1.01 | UHV Chamber Specification (vacuum better than 2×10-9 mbar UHV) Chamber Overview Spherical (diameter ≥ 14”) or equivalent square shaped UHV chamber with support frame equipped with three (3) X 2-inch magnetron sputtering sources. All CF Flanges and UHV Viewports/SS blanks | 1 | Nos. | 2,15,000 ₹2,53,700 Lowest | 13,00,000 ₹15,34,000 |
| 1.02 | Three (3) X 2-inch magnetron sputtering sources. Each sputtering source has an individual gas inlet line for process gases. All CF Flanges. | 3 | Nos. | 12,00,000 ₹14,16,000 Lowest | 16,50,000 ₹19,47,000 |
| 1.03 | Substrate holder : Diameter: 2 inches; heating Molybdenum heater capable of heating substrate (a) from room temperature (RT) to 800°C during rotation and (b) from room temperature to 1000°C without rotation. Rotation: Substrate holder can rotate continuously, driven by a stepper motor. Variable speed from 0 to 10 RPM
Movement: Up / down vertical movement of total 25mm to adjust substrate position during deposition Sputtering geometry: One sputtering source mounted parallel to the substrate surface, tilt adjustable. Two sputtering sources mounted confocally at an angle relative to the substrate. Base pressure: lower than 2 × 10⁻⁹ mbar (ultra-high vacuum). | 1 | Nos, | 14,00,000 ₹16,52,000 | 7,00,000 ₹8,26,000 Lowest |
| 1.04 | Vacuum Pumping System: Turbo Molecular Pump: Pfeiffer HiPace300 / Edwards nEXT 300 / Leybold Turbovac 350i with CF100 flange or equivalent with integrated controller | 1 | Nos. | 5,00,000 ₹5,90,000 Lowest | 6,20,000 ₹7,31,600 |
| 1.05 | Ion Pump with controller: Included to maintain UHV vacuum levels and provide clean pumping. | 1 | Nos. | 9,50,000 ₹11,21,000 | 5,50,000 ₹6,49,000 Lowest |
| 1.06 | Backing Pump: Pfeiffer HiScroll 12 / Edwards nXDS 15i / Leybold scroll VAC 15 plus or equivalent dry scroll pump used to back TMP | 1 | Nos. | 3,75,000 ₹4,42,500 | 3,50,000 ₹4,13,000 Lowest |
| 1.07 | Gate Valves : One CF100 and one CF150 manual Gate valves for isolating the chamber from the pumping systems as well as throttling | 2 | Nos. | 11,00,000 ₹12,98,000 | 9,60,000 ₹11,32,800 Lowest |
| 1.08 | Vacuum Gauges and Measurement: One Cold cathode gauge with readout capable of measuring vacuum pressures down to1×10-10 mbar for precise UHV monitoring. | 1 | Nos. | 2,50,000 ₹2,95,000 | 2,20,000 ₹2,59,600 Lowest |
| 1.09 | One Capacitance manometer gauge with measurement range from 1× 10-1 to 1 × 10⁻³ mbar for accurate pressure reading during deposition phase | 1 | Nos. | 2,85,000 ₹3,36,300 | 2,20,000 ₹2,59,600 Lowest |
| 1.10 | Gas Delivery System: Two independent Mass Flow Controllers (MFCs):
a. One MFC (0-100 sccm) for Argon gas feeding to all three sputtering sources via high vacuum valves.
b. One MFC (0-100 sccm) for Nitrogen gas feeding directly into the chamber with its own high vacuum valve.
Gas lines for Ar and N2 are physically separated to avoid cross-contamination. | 2 | Nos. | 2,50,000 ₹2,95,000 | 2,00,000 ₹2,36,000 Lowest |
Tender Value
Refer Docs
EMD Value
₹5.1 L
Closing Date
23 Jun 2026, 3:00 pmClosed
Sr. Controller of Stores and Purchase
Room NO. 160, Purchase Branch, CSIR-NPL
UHV Deposition Chamber 14-VII/SS(3063-OTE)25PB/T-08
2026_CSIR_278157_1
14-VII/SS(3063-OTE)25PB/T-08
Open Tender
Laboratory and scientific equipment
Supply
120 days
Room NO. 160, Purchase Branch, CSIR-NPL
Please refer to tender document
7 documents required · 7 mandatory
₹0
₹5.1 L
Yes
ONLINE
22 Jul 2026
20 May 2026
24 Jun 2026
20 May 2026
23 Jun 2026
8 Jun 2026
20 May 2026 - 25 May 2026
26 May 2026
| Sl No | Description | Qty | Unit | Est. Rate | Est. Amount |
|---|---|---|---|---|---|
| 1.01 | UHV Chamber Specification (vacuum better than 2×10-9 mbar UHV) Chamber Overview Spherical (diameter ≥ 14”) or equivalent square shaped UHV chamber with support frame equipped with three (3) X 2-inch magnetron sputtering sources. All CF Flanges and UHV Viewports/SS blanks | 1 | Nos. | - | - |
| 1.02 | Three (3) X 2-inch magnetron sputtering sources. Each sputtering source has an individual gas inlet line for process gases. All CF Flanges. | 3 | Nos. | - | - |
| 1.03 | Substrate holder : Diameter: 2 inches; heating Molybdenum heater capable of heating substrate (a) from room temperature (RT) to 800°C during rotation and (b) from room temperature to 1000°C without rotation. Rotation: Substrate holder can rotate continuously, driven by a stepper motor. Variable speed from 0 to 10 RPM
Movement: Up / down vertical movement of total 25mm to adjust substrate position during deposition Sputtering geometry: One sputtering source mounted parallel to the substrate surface, tilt adjustable. Two sputtering sources mounted confocally at an angle relative to the substrate. Base pressure: lower than 2 × 10⁻⁹ mbar (ultra-high vacuum). | 1 | Nos, | - | - |
| 1.04 | Vacuum Pumping System: Turbo Molecular Pump: Pfeiffer HiPace300 / Edwards nEXT 300 / Leybold Turbovac 350i with CF100 flange or equivalent with integrated controller | 1 | Nos. | - | - |
| 1.05 | Ion Pump with controller: Included to maintain UHV vacuum levels and provide clean pumping. | 1 | Nos. | - | - |
| 1.06 | Backing Pump: Pfeiffer HiScroll 12 / Edwards nXDS 15i / Leybold scroll VAC 15 plus or equivalent dry scroll pump used to back TMP | 1 | Nos. | - | - |
| 1.07 | Gate Valves : One CF100 and one CF150 manual Gate valves for isolating the chamber from the pumping systems as well as throttling | 2 | Nos. | - | - |
| 1.08 | Vacuum Gauges and Measurement: One Cold cathode gauge with readout capable of measuring vacuum pressures down to1×10-10 mbar for precise UHV monitoring. | 1 | Nos. | - | - |
| 1.09 | One Capacitance manometer gauge with measurement range from 1× 10-1 to 1 × 10⁻³ mbar for accurate pressure reading during deposition phase | 1 | Nos. | - | - |
| 1.1 | Gas Delivery System: Two independent Mass Flow Controllers (MFCs):
a. One MFC (0-100 sccm) for Argon gas feeding to all three sputtering sources via high vacuum valves.
b. One MFC (0-100 sccm) for Nitrogen gas feeding directly into the chamber with its own high vacuum valve.
Gas lines for Ar and N2 are physically separated to avoid cross-contamination. | 2 | Nos. | - | - |
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