Design and Installation of Gas Distribution System and Chilled Water Distribution System

Dual cylinder, Semi-automatic change over panel for Methane gas

Single cylinder TMB/Diborane gas cabinet with inbuilt Valve Manifold Box of one stick inlet and 3 stick outlets

Single cylinder Oxygen (O2) gas panel

Single cylinder Argon (Ar) gas panel

Single cylinder Nitrogen [high purity] gas panel

Dual cylinder gas supply panel with semi-automatic change over for Nitrogen (industrial pure) gas

Dual cylinder, Semi-automatic change over panel for Hydrogen gas

Air compressor with it’s components for oil free compressed dry air (CDA)

¼” Diaphragm valve The valves shall be manually operated and made of SS316L according to ASTM A276 specifications. The maximum working pressure of the valve shall be 10 bar. The valves shall bear leak integrity of 10^-9 mbar lit/sec. The end connections shall be VCR end.

¼” Ball Valve The ball valves shall be manually operated and made of SS316L and of single piece construction. The maximum working pressure shall be at least 10 bar or above. The end connections shall be double compression end.

¼” tube for process gases: ¼” tube stainless steel electropolished with necessary fittings and supports

½“ x ¼“ co-axial tube for TMB/Diborane process gas: ½“ (bright annealed), ¼“ tube stainless steel electropolished with necessary fittings and supports

½” tube for N2(Industrial Pure) and CDA: ½“ (bright annealed) stainless steel with necessary fittings and supports

¼” tube for N2(Industrial Pure) and CDA: ¼“ (bright annealed) stainless steel with necessary fittings and supports

Gas detector (SIL 2 certified) for CH4 and H2: Lel gas detector (single sensor for both H2, CH4) with its accessories.

Gas leak detection system with centralized controller for gas handling system with related cables, wiring, PLC, HMI panel (7” Display or higher) with controller card and other accessories.

Gas distribution system installation by means of orbital welding followed by testing (Pressure hold test & Helium leak check (TMB/Diborane, CH4, H2, Ar, O2, N2 (High pure) followed by validation (Trace oxygen, Trace Moisture & Trace particle)). The gas line connections need to be tested and validated for pressure hold test, for 24 hours, Helium leak, up to 1 X 10-9 He mBar lit sec-1, trace moisture, tested for less than 5 PPM impurities, trace Oxygen tested for less than 5 PPM and particles, up to 0.1-micron level.

Support structure for gas tube lines: Unistruts for the support structure (GI), cable tray/conduits for single cables

Tube clamps (MOC SS with PVC/PP Inserts)

Anchor bolts & Nuts and fittings (required for above mentioned gas lines)

Dual Cylinder holding structure: For CH4, H2 & N2 (Industrial pure) *Structure should have a canopy to safeguard it from rain as it will be kept in open balcony. Individual cylinder capacity is 47 to 50 Liters.

Single Cylinder holding structure: For Ar, O2 & N2 (High pure) *Structure should have a canopy to safeguard it from rain as it will be kept in open balcony. Individual cylinder capacity is 47 to 50 Liters.

Exhaust duct (from gas cabinet): 4” exhaust duct, 2mm thickness with fittings and accessories.

Exhaust duct (for MPCVD vacuum pump outlet): 1.5” exhaust duct, 2mm thickness with fittings and accessories.

Dry/Wet scrubber: *Available space for scrubber installation is 1 M x 1 M (Lx B) will be kept in the balcony as shown in the figure 1.

Blowers for Exhaust: * Designed for Flowrate as per the requirement of gas cabinet/panel and CVD vacuum pump outlet exhaust.

Instrumentation Cables and Necessary Cable Trays: CAT6 cable with necessary cable lugs and cable tray.

3” PIPE FOR CHILLED WATER: 3” Sch 10 Stainless Steel 304 pipe with Insulation (Nitrile Rubber and Aluminium Cladding) with necessary Gate Valves, Fittings and Supports

1” PIPE FOR CHILLED WATER: 1” Sch 10 Stainless Steel 304 pipe with Insulation (Nitrile Rubber and Aluminium Cladding) with necessary Gate Valves, Fittings & Supports

Chilled water distribution system installation followed by Pressure hold test. Pressure hold test for chilled water lines at the site. Certified up to 1.5 times of the working pressure by keeping the system under pressure using RO Water/Nitrogen Gas for 24 hours without a drop in pressure.

UHP Technologies private limited